| 摘要 |
PURPOSE:To prevent moving sections, their peripheral sections, and objects of work from malfunctioning and braking in a precision positioning device by acting to retract, stop, and fix the moving sections of the device in earthquake of specified earthquake intensity or more. CONSTITUTION:Relative movements caused by earthquake are detected as the acceleration in each direction of the X axis through Z axis by acceleration sensors (1X through 1Z)1, and the detected fine signals of the axes X through Z are amplified by amplifiers 2(2X through 2Z) respectively, and an earthquake sensing section 3 judges whether or not acceleration signals, to which amplified output is added, exceed the specified level, i.e., the specified earthquake intensity. Judging that actual earthquake intensity exceeds the specified earthquake intensi ty, the earthquake sensing section 3 outputs earthquake detecting signals. A device stop processing section 4 acts to retract, stop, and fix the moving section of the device based on the output signals. Thus, the moving section can be prevented from running into the objects of work, and as a result the moving section, its peripheral sections, and the objects of work can be prevented from malfunctioning and breaking. |
