,申请号DE19853507143-传众专利搜索

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发明名称
摘要
申请公布号	DE3507143(C2)	申请公布日期	1991.02.21
申请号	DE19853507143	申请日期	1985.02.28
申请人	FUSION SYSTEMS CORP., ROCKVILLE, MD., US	发明人	CAMM, DAVID, VANCOUVER, CA
分类号	G02B5/10;F21V7/09;G03B27/54;G03F7/20;H01L21/027	主分类号	G02B5/10
代理机构		代理人
主权项
地址

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