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发明名称
SEMICONDUCTOR POSITION DETECTOR
摘要
申请公布号
JPH0339601(A)
申请公布日期
1991.02.20
申请号
JP19890173326
申请日期
1989.07.05
申请人
HAMAMATSU PHOTONICS KK
发明人
HORIGUCHI CHIYOHARU
分类号
G01B11/00;G01C3/08;H01L31/10
主分类号
G01B11/00
代理机构
代理人
主权项
地址
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