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发明名称
摘要
申请公布号	JPH0311539(B2)	申请公布日期	1991.02.18
申请号	JP19830120409	申请日期	1983.07.04
申请人	NIPPON KOGAKU KK	发明人	HAYASHI YUTAKA;IZAWA HISAO
分类号	G03F9/00;G03F7/20;H01L21/027	主分类号	G03F9/00
代理机构		代理人
主权项
地址

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