PROJECTION ALIGNER FOR MANUFACTURE OF INTEGRATED CIRCUIT,申请号JP19890330388-传众专利搜索

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发明名称	PROJECTION ALIGNER FOR MANUFACTURE OF INTEGRATED CIRCUIT
摘要
申请公布号	JPH0334308(A)	申请公布日期	1991.02.14
申请号	JP19890330388	申请日期	1989.12.19
申请人	CANON INC	发明人	HIROSE TAKAMASA
分类号	G03F7/20;H01L21/027;H01S3/106	主分类号	G03F7/20
代理机构		代理人
主权项
地址

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