摘要 |
PURPOSE:To sharply improve an organic thin film EL element in durability and mechanical strength by a method wherein the organic thin film EL element is provided with a hole transfer layer which is formed of a plasma polymer film of monomer selected from a group such as aniline, aniline derivative, pyridine, and pyridine derivative. CONSTITUTION:A plasma polymer film is formed of O-4-xylidine [H2N-(CH3-)C6 H3-CH3] by the use of a film forming device, and an organic thin film EL element is formed, where the polymer film concentrated is made to serve as a hole transfer layer 2. Argon is used as discharge gas (a). Moreover (b) is bubbled with argon and introduced into a vacuum chamber 11. A board 12 is formed of glass (ITO glass) coated with indium oxide, a light emitting layer 3 is formed of perylene, and an electron injection layer (metal electrode) 5 is formed of Mg. |