| 摘要 |
PURPOSE:To make operation correspondent to the various objects of inspection and to improve the reliability of the inspection by generating plural shdows caused by irradiation from various direction to the object of the inspection and executing subtraction processing. CONSTITUTION:A illuminating lamp 10 is emitted and a shadow 16 of a chip part 9 is generated and stored as a picture P1 at such a time in a picture recognizing part 15. Samely, lighting lamps 11-13 are successively emitted and shadows 17-19 are stored as pictures P2-P4 in the picture recognizing part 15. The subtraction processing is executed to the acquired pictures P1-P4 between the acquired pictures (between P1 and P3 and between P2 and P4) and the acquired pictures are stored as pictures Pa and Pb in the picture recognizing part 15. By designating the several shadows of the detection objects, calculating and comparing the detailed position or dimension to the objects of the inspection, the quality of the object is decided. |
