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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0334418(A)
申请公布日期
1991.02.14
申请号
JP19890166822
申请日期
1989.06.30
申请人
FUJITSU LTD
发明人
OJIRI HIDEHIRO;FUJIMURA SHUZO
分类号
H01L21/22;H01L21/225
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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