| 摘要 |
Apparatus for laser processing, such as drilling of a workpiece, optionally has an optical fiber and output coupler for applying laser light to machine a workpiece and cause it to vibrate. An acoustic sensor is mounted on the workpiece, and a determining means, such as a computer, determines when the vibrations change, such as when they cease. The information can be used to change the laser pulse power and duration and the relative distance of the laser focal plane on the workpiece. A method of laser processing a workpiece causes vibrations in the workpiece by applying laser light to it, monitors the vibrations, and determines when they change. |
