| 摘要 |
PURPOSE:To make possible the storage of shaded image of a reference pattern with less memories by a method wherein the length and breadth of the shaded image of the reference pattern are both ready-made to store in advance in the memories in the form of rough pixel data with the size of pixel (n) times as large as that of a pattern to be inspected and a shaded image regenerated as pixel data of a size identical with that of the pattern to be inspected is used as the shaded image of the reference pattern. CONSTITUTION:Data on a shaded image, which is restored in a pixel size identical with that of a pattern to be inspected, of a reference pattern is stored in a buffer memory 8 and the data, which is fetched out from the memory 8, on the shaded image of the reference pattern is inputted in a defect decision part 4 and a positional deviation amount metering part 9. The metering part 9 meters the amount of a positional deviation between the reference pattern and the pattern to be inspected from the shaded images of both patterns, the address of the memory 8, that is, the position of the shaded image of the reference pattern is corrected by an address control part 10 on the basis of the value of the amount DELTAX of a positional deviation in a horizontal scanning direction (a) and the value of the amount DELTAY of a positional deviation in a vertical scanning direction (b) and the alignment of the pattern to be inspected to the reference pattern is performed. In a state that the alignment is performed, the shaded image, which is taken by a one-dimensional camera 2, of the pattern to be inspected and the restored shaded image of the reference pattern are compared with each other in the part 4 and the detection of a defect is performed. |
