| 摘要 |
PURPOSE:To enlarge a homogenous discharge region for free setting of discharge parameters E/P at the optimum value, by arranging an inductor electrode coated with inductor between an anode and cathode to generate AC discharge as auxiliary discharge. CONSTITUTION:The impression of the voltage from an AC high voltage power source 13 generates AC discarhge between the cathode 2 and fine gold 11 with the realization of low ionization homogenous in the direction of an optical axis in the neighborhood of the cathode 2. Inductnace 14 generates AC discharge simultanously between the anode 1 and fine gold 11 for homogenous low ionization over the entire space of main discharge. When DC high voltage from a DC high voltage power source 5 is impressed between the anode 1 and cathode 2 in the presence of such auxiliary discharge, spreading discharge in a shape of crawl over the surface of the inductor electrode 10 is obtained in the neighborhood of the cathode 2. |
