发明名称 TOOL CLEANING MECHANISM FOR BONDER
摘要 PURPOSE:To suck dust around a tool effectively and to prevent the scattering of the dust into the surrounding region by arranging a duct comprising a sucking path and a tool inserting hole at the upper part of a cleaning member. CONSTITUTION:Cleaning is performed with a rough grindstone 51, a finishing grindstone 52 and a wire brush 53 which are provided on a cleaning stage of a tool cleaning part 4a. At this time, the tip of a tool 41 is inserted into a tool inserting hole 60b of a duct 60. The dust of foreign material removed from the tool 41 is sucked into a duct 60 surrounding the tool 41. Therefore, the dust generated in cleaning can be sucked into the duct 60 effectively from the surrounding part of the tool 41, and the scattering of the dust can be prevented.
申请公布号 JPH0332035(A) 申请公布日期 1991.02.12
申请号 JP19890165249 申请日期 1989.06.29
申请人 SHINKAWA LTD;HITACHI LTD 发明人 ISHIDA HISAO;NISHIMURA AKIHIRO;SATO KIMIHARU;OKAMOTO MICHIO;NAKANISHI MASAKI
分类号 H01L21/52;H01L21/60 主分类号 H01L21/52
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