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发明名称
WAFER CONVEYING MECHANISM
摘要
申请公布号
JPH0331149(A)
申请公布日期
1991.02.08
申请号
JP19890169499
申请日期
1989.06.29
申请人
NEC CORP
发明人
AMAI HIDEMI
分类号
B65H7/14;B65G49/07;B65H5/04
主分类号
B65H7/14
代理机构
代理人
主权项
地址
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