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发明名称
SEMICONDUCTOR INTEGRATED CIRCUIT DEVICE
摘要
申请公布号
JPH0330464(A)
申请公布日期
1991.02.08
申请号
JP19890163964
申请日期
1989.06.28
申请人
HITACHI LTD
发明人
OKAWA MASAAKI
分类号
H01L21/768;H01L21/822;H01L23/522;H01L27/04
主分类号
H01L21/768
代理机构
代理人
主权项
地址
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