MOLECULAR BEAM VAPOR DEPOSITION DEVICE,申请号JP19890164974-传众专利搜索

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发明名称	MOLECULAR BEAM VAPOR DEPOSITION DEVICE
摘要
申请公布号	JPH0330318(A)	申请公布日期	1991.02.08
申请号	JP19890164974	申请日期	1989.06.27
申请人	HITACHI LTD	发明人	OGAWA YOSHIFUMI;TAKAHASHI NUSHITO;KAWADA HIROKI;FURUSE MUNEO;TAMURA NAOYUKI
分类号	C30B23/08;H01L21/203	主分类号	C30B23/08
代理机构		代理人
主权项
地址

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