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发明名称
METHOD AND DEVICE FOR ION IMPLANTATION
摘要
申请公布号
JPH0329258(A)
申请公布日期
1991.02.07
申请号
JP19900099577
申请日期
1990.04.16
申请人
NISSIN ELECTRIC CO LTD
发明人
NOGAMI TSUKASA
分类号
H01J37/317;H01L21/265
主分类号
H01J37/317
代理机构
代理人
主权项
地址
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