Appts. for vapour deposition of material under high vacuum - has incandescent cathode and electrode to maintain arc discharge

摘要

Appts. for the vapour deposition of material under a high vacuum with an incandescent cathode has a first electrode, used as an anode, and the electrons emitted from the cathode impinge on the material to be evaporated. A second electrode in the vapour deposition chamber is used to maintain an arc discharge . because the first electrode is switched as a cathode relative to the second electrode. ADVANTAGE - Intensified activation.