摘要 |
PURPOSE:To improve resolving power and sensitivity and to improve heat resistance by adding meta-cresol and aldehydes to a resol type resin obtd. by bringing para-cresol and aldehydes into reaction in the presence of a basic catalyst and further, bringing the same into reaction in the presence of an acidic catalyst. CONSTITUTION:The meta-cresol and aldehydes are added to the resol type resin compsn. obtd. by bringing the para-cresol and aldehydes into reaction in the presence of the basic catalyst and further the reaction is effected in the presence of the acidic catalyst. The molar ratio of the para-cresol and meta-cresol is in a 1/10 to 1/2 range and the weight average mol. wt. of the novolak resin is 3,000 to 15,000. The good pattern shape is obtd. and the heat resistance, resolution and sensitivity are improved in this way. |