MANUFACTURE OF X-RAY MASK

摘要

PURPOSE:To obtain a highly accurate X-ray mask whose pattern is not dislocated by a method wherein bonding parts in which the X-ray mask is bonded to a reinforcement frame are formed so as to be concentrated in parts of the X-ray mask. CONSTITUTION:Bonding parts 5' in which an X-ray mask is bonded to a reinforcement frame 4 are formed so as to be concentrated in parts of the X-ray mask. When a bonding area is reduced in this manner, a force to be generated when an adhesive 5 is contracted can be suppressed to be small and a dislocation of e pattern can be reduced. When only parts of a support body 3 are bonded and most of other parts are set in a free state, the support body 3 and a mask substrate 2 can be expanded and contracted freely even when a temperature difference is caused at a bonding operation and a transcription operation. Thereby, the X-ray mask can be manufactured with high accuracy, and a high-performance semiconductor device can be manufactured.