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发明名称
MEASURING METHOD BY SPECKLE PATTERN INTERFERENCE
摘要
申请公布号
JPH0329804(A)
申请公布日期
1991.02.07
申请号
JP19890165682
申请日期
1989.06.28
申请人
KEYENCE CORP
发明人
AKISHIBA YUUJI;HIRAI MAKOTO
分类号
G01B11/16;G01N21/88;G01N21/93
主分类号
G01B11/16
代理机构
代理人
主权项
地址
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