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发明名称
POSTIVE-WORKING PHOTOSENSITIVE POLYMIDE OPERATED BY PHOTO INDUCED MOLECULAR WEIGHT CHANGES
摘要
申请公布号
EP0375838(A3)
申请公布日期
1991.02.06
申请号
EP19890116347
申请日期
1989.09.05
申请人
INTERNATIONAL BUSINESS MACHINES CORPORATION
发明人
MOORE, JAMES A.;DASHEFF, ANDREW N.;KAUFMAN, FRANK B.
分类号
C09D179/08;G03F7/038;G03F7/039;H01L21/027;(IPC1-7):G03F7/039
主分类号
C09D179/08
代理机构
代理人
主权项
地址
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