发明名称 |
METHODS OF PREPARATION OF SURFACES AND APPLICATIONS THEREFOR |
摘要 |
A method of machining a workpiece (14) using an active fluid and a tool (12) positioned substantially out of contact with a surface of said workpiece (14) which is to be machined utilises the combination of the shape of said tool (12) and its position relative to said surface cooperate to cause local enhancement of the activity of said active fluid, thereby locally enhancing the rate of removal of material from said surface. |
申请公布号 |
GB9027130(D0) |
申请公布日期 |
1991.02.06 |
申请号 |
GB19900027130 |
申请日期 |
1990.12.14 |
申请人 |
NATIONAL RESEARCH DEVELOPMENT CORPORATION |
发明人 |
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分类号 |
C04B41/91;B24B1/00;B24B37/00;C23F1/00;C25F3/12;H01L21/304 |
主分类号 |
C04B41/91 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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