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发明名称
DEVICE AND PROCESS FOR TREATING FINE PARTICLES
摘要
申请公布号
EP0261973(B1)
申请公布日期
1991.02.06
申请号
EP19870308473
申请日期
1987.09.24
申请人
CANON KABUSHIKI KAISHA
发明人
SUGATA, HIROYUKI;SUGATA, MASAO;KURIHARA, NORIKO;DEN, TOHRU;ANDO, KENJI;KAMIYA, OSAMU
分类号
C23C14/24;B01J4/00;B01J12/00;B01J12/02;B01J19/08;B22F1/00;B22F1/02;B22F9/12;C23C16/48;C23C16/54
主分类号
C23C14/24
代理机构
代理人
主权项
地址
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