| 摘要 |
PURPOSE:To develop wafers automatically without unevenness of development by providing a placing plate which is provided with a holding member for the wafers and is made turnable by an induction motor with an electromagnetic brake or the like to an upward and downward moving member. CONSTITUTION:A developing device consists of an upward and downward moving member 5 fitted pivotally with a wafer placing plate 4, and a developing tank 6 disposed below the plate 4. A holding member 15 for wafers 1 is provided to the plate 4. An induction motor 10 with an electromagnetic brake is secured to the top end side of the erecting part 9a of the arm 9 of rods 8, 9, and the plate 4 is made freely turnable by the driving of the motor 10, so that the wafers are handled by each sheet. It is possible to develop the wafers in the finest developing conditions and to obviate unevenness of development with such constitution. |
