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发明名称
Centrifugal spin dryer for semiconductor wafer
摘要
申请公布号
US4989345(A)
申请公布日期
1991.02.05
申请号
US19890451950
申请日期
1989.12.18
申请人
GILL, JR., GERALD L.
发明人
GILL, JR., GERALD L.
分类号
F26B11/08;F26B5/08;H01L21/00;H01L21/304
主分类号
F26B11/08
代理机构
代理人
主权项
地址
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