发明名称 LAYOUT INSPECTING DEVICE
摘要 PURPOSE:To judge a design rule check value at first sight by outputting layout pattern data for displaying design rule check value on a screen. CONSTITUTION:A read means 12 reads layout data for displaying design rule check value from a layout data base for displaying design rule check value 11 and displays it on screen. A selection means 14 selects the design rule check value to be changed among layout data displayed on the screen from the screen and an input means 15 inputs a change value with respect to the selected design rule check value. The changed design rule check value is displayed on layout data on the screen of a display part 16 again. Thus, the design rule check value can freely and interactively set and a design rule check file can automatically be generated by a value which a user sets, whereby a layout can be inspected by using the generated design rule check file.
申请公布号 JPH0327475(A) 申请公布日期 1991.02.05
申请号 JP19890162103 申请日期 1989.06.23
申请人 MITSUBISHI ELECTRIC CORP 发明人 SASADA MAKIKO
分类号 G01B11/24;G01R31/28;G06F17/50;H01L21/027;H01L21/82 主分类号 G01B11/24
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