Scanning apparatus for a scanning microscope

摘要

A scanning apparatus for scanning which is used in a scanning microscope having an observation apparatus for observing a sample wherein the sample is secured in order to obtain an image of the same. The scanning apparatus includes a moving apparatus for moving at least either the sample or the observation apparatus in order to scan the sample, and a vibration attenuating element structurally provided for the moving apparatus for attenuating relative vibration between the sample and the observation.