RESIST PEELING DEVICE

摘要

PURPOSE:To acquire ozone of high concentration by an ozone generating device of a small capacity and to reduce a production cost by collecting unused ozone inside a sealed treatment vessel for resist peeling to an ozone generating device after dehydrating and cooling the ozone. CONSTITUTION:Ozone 9 is supplied to a substrate 7 which is coated with a resist 6 from an ozone generating device 5 in a sealed treatment vessel 1. The resist 6 is oxidized by the ozone 9 and peeled as carbon dioxide and water vapor. Ozone remaining unused during the oxidation reaction is collected to a gas collector 14 and water vapor thereof is absorbed at a moisture removing section 12 and collected to the ozone generating device 5. The ozone 9 which is heated to a high temperature in the vessel 1 is cooled by a cooling pipe 13 and decomposition can be prevented. Therefore, a part of ozone which had been exhausted as unused in a peeling treatment is used again. Ozone of high concentration can be acquired by a generating device of a small capacity in this way.