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发明名称
SCANNING-TYPE TUNNEL MICROSCOPE
摘要
申请公布号
JPH0326902(A)
申请公布日期
1991.02.05
申请号
JP19890163224
申请日期
1989.06.26
申请人
JEOL LTD
发明人
KOBAYASHI HIDEO
分类号
G01B7/34;G01Q60/10;G01Q60/16;G01Q70/02;H01J37/28
主分类号
G01B7/34
代理机构
代理人
主权项
地址
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