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发明名称
BOAT ON WHICH WAFER MADE OF SIC IS LOADED
摘要
申请公布号
JPH0325925(A)
申请公布日期
1991.02.04
申请号
JP19890159485
申请日期
1989.06.23
申请人
TOSHIBA CERAMICS CO LTD
发明人
NOZAWA TATSUO
分类号
H01L21/22;H01L21/31
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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