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发明名称
DESIGN OF INTEGRATED CIRCUIT
摘要
申请公布号
JPH0325954(A)
申请公布日期
1991.02.04
申请号
JP19890161437
申请日期
1989.06.23
申请人
NEC CORP
发明人
TSUKUDA FUMIAKI
分类号
H01L21/3205;H01L21/82;H01L21/822;H01L23/52;H01L27/04
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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