| 摘要 |
PURPOSE:To correct the nonuniformity of discharge characteristics in the longitudinal direction of a discharge part by controlling voltages applied to divided grids provided in such a way that whole grids are divided into at least two parts each with respect to the longitudinal direction of the discharge part. CONSTITUTION:The grids 1a and 1b are at least bisected in the longitudinal direction of the discharge part, and preferably they are obliquely bisected with respect to the diagonal pair of a rectangular discharge opening part. The divided ones are nonconductive in terms of electricity. The first and second divided grids 1a and 1b are connected to bias power sources 7a and 7b for first and second grids, and applied voltages are controlled independently, whereby discharge characteristics in the longitudinal direction of the discharge part of the device are determined. Consequently, the longitudinal discharge characteristics can be made uniform. |
