摘要 |
PURPOSE:To prevent roughening of an electrode surface on the lower electric potential side due to the discharge between adjoining electrodes by preferentially applying voltage for conditioning only between specified electrodes, in the same direction as in used. CONSTITUTION:At the time of conditioning, each electrode 1a-1f is connected to a power source 7 for conditioning through a connection switching circuit 6. In the drawing, the conditioning between electrodes 1a and 1b is depicted, in which electrodes 1b-1f are commonly connected together by the connection switching circuit 6. An electric field of the same direction as in use is thus applied between the electrodes 1a and 1b, whereby conditioning is performed. As the voltage is applied between the specified electrodes in the same direction as in the normal use, through the discharge during conditioning, roughening of the electrode surface on the lower electric potential side can be prevented. |