CHARGE NEUTRALIZATION DEVICE IN ION BEAM IRRADIATION DEVICE,申请号JP19890159301-传众专利搜索

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发明名称	CHARGE NEUTRALIZATION DEVICE IN ION BEAM IRRADIATION DEVICE
摘要
申请公布号	JPH0325846(A)	申请公布日期	1991.02.04
申请号	JP19890159301	申请日期	1989.06.20
申请人	FUJITSU LTD	发明人	MORI HARUHISA;IGARASHI TAKASHI;KASE MASATAKA
分类号	H01J37/317;H01L21/265	主分类号	H01J37/317
代理机构		代理人
主权项
地址

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