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发明名称
PRODUCTION DEVICE FOR SEMICONDUCTOR
摘要
申请公布号
JPH0325926(A)
申请公布日期
1991.02.04
申请号
JP19890162336
申请日期
1989.06.22
申请人
MITSUBISHI ELECTRIC CORP
发明人
TAMURA KATSUHIKO
分类号
H01L21/22
主分类号
H01L21/22
代理机构
代理人
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