HALBLEITER-SCHWINGUNGS-DETEKTOR-ANORDNUNG IN HEBELBAUWEISE.

摘要

A semiconductor vibration detection device according to the present invention includes a movable lever which is supported by the semiconductor base with at least one of its ends and includes a vibrating part that extends, with an incorporated electrode, approximately parallel to the semiconductor base, and a fixed electrode layer which is provided on the semiconductor base opposite to the movable lever. The movable lever has a triple layer structure in which the middle section is a polysilicon layer that is formed to be alkali-etching-proof and a top and a bottom layers that are sandwiching the middle layer are also of alkali-etching-proof.