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发明名称
FORMATION OF ELECTRODE OR WIRING
摘要
申请公布号
JPH0323630(A)
申请公布日期
1991.01.31
申请号
JP19890158990
申请日期
1989.06.21
申请人
TOSHIBA CORP
发明人
KOBAYASHI MASAKI
分类号
H01L21/3205;H01L21/28;H01L21/338;H01L23/52;H01L29/812
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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