| 摘要 |
PURPOSE:To permit highly accurate positioning by a method wherein a laminated piezoelectric actuator is piled on a plate type piezoelectric ceramics, developing piezoelectric shearing effect by the impression of a voltage and generating a displacement into the direction of the surface of the plate, and the mutual displacements are connected in series. CONSTITUTION:When a voltage is impressed on two pieces of a laminated piezoelectric actuators 1, respective actuators 1 are displaced into the direction of the lamination thereof by the amount of displacement l1 respectively. In this case, two pieces of the actuators 1 are opposed whereby the amount of displacements of the whole of the actuators becomes two times of the amount l1. On the other hand, a ceramics 2 is displaced into the direction of the surface of the plate by the amount of displacement l2 due to the piezoelectric shearing effect when a voltage is impressed on a plate type piezoelectric ceramics 2, pinched by two pieces of actuators 1 at the center between them. In this case, the direction of the displacement of the ceramics 2 is same as the direction of the displacement of the actuators 1 due to connection to a connecting member 3 and, therefore, a piezo-actuator 10 may obtain the enlarged displacement of (2 X displacement l1 + displacement l2) since the displacement direction is same as the displacement directions of the actuators 1 by the connection to the connecting member 3. |
