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经营范围
发明名称
EXPOSURE SYSTEM
摘要
申请公布号
JPH0323621(A)
申请公布日期
1991.01.31
申请号
JP19890159129
申请日期
1989.06.21
申请人
NEC CORP
发明人
HONDA TOSHIYUKI
分类号
H01L21/82;G06F17/50;H01L21/027;H01L21/30
主分类号
H01L21/82
代理机构
代理人
主权项
地址
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