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发明名称
MANUFACTURE OF CMOS SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH0322473(A)
申请公布日期
1991.01.30
申请号
JP19890157671
申请日期
1989.06.19
申请人
NEC CORP
发明人
OBARA SHINJI
分类号
H01L29/78;H01L21/8238;H01L27/092
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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