发明名称 |
Improved resolution confocal microscope, and device fabrication method using same. |
摘要 |
<p>A new confocal microscope and a new device fabrication method in which linewidth control is achieved using the new confocal microscope are disclosed. This new confocal microscope has a configuration which achieves multiple passes, e.g., three, four, five, six, seven or more passes, of the incident light through the objective lens of the microscope. As a consequence, the new confocal microscope exhibits a smaller effective depth of focus and a smaller effective resolution than a conventional confocal microscope. <IMAGE></p> |
申请公布号 |
EP0410634(A2) |
申请公布日期 |
1991.01.30 |
申请号 |
EP19900307847 |
申请日期 |
1990.07.18 |
申请人 |
AMERICAN TELEPHONE AND TELEGRAPH COMPANY |
发明人 |
FELDMANN, MARTIN;SIMPSON, PRINCESS ELAINE |
分类号 |
G01B11/00;G01B11/02;G02B21/00;G03F7/20;H01L21/027;H01L21/30 |
主分类号 |
G01B11/00 |
代理机构 |
|
代理人 |
|
主权项 |
|
地址 |
|