Method for forming a superconducting circuit.

摘要

A method for forming a superconducting circuit is disclosed, comprising the steps of forming a mask pattern (22) on a superconducting layer (21), forming a covering layer (23a, 23b), containing a modifying element for superconductor, on the resultant structure, diffusing the modifying element for superconductor, which is contained in the covering layer (23b), into the superconducting layer (21) to modify a corresponding location to a nonsuperconducting layer. A method for forming a multi-layer superconducting circuit is also disclosed, comprising sequentially repeating the same steps as set forth above over a substrate (20).