WAFER INSPECTING APPARATUS,申请号JP19890157688-传众专利搜索

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发明名称	WAFER INSPECTING APPARATUS
摘要
申请公布号	JPH0322453(A)	申请公布日期	1991.01.30
申请号	JP19890157688	申请日期	1989.06.19
申请人	NEC CORP	发明人	MATAI SADAO
分类号	G01R1/073;H01L21/66	主分类号	G01R1/073
代理机构		代理人
主权项
地址

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