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发明名称
VAPOR GROWTH DEVICE
摘要
申请公布号
JPH0322523(A)
申请公布日期
1991.01.30
申请号
JP19890157915
申请日期
1989.06.20
申请人
FUJITSU LTD
发明人
TSUKUNE ATSUHIRO;MIENO FUMITAKE;NAKAZAWA TSUTOMU;YAMAGUCHI AKIO
分类号
H01L21/205;H01L21/31
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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