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发明名称
SILANE COMPOUND AND ITS PRODUCTION
摘要
申请公布号
JPH0320286(A)
申请公布日期
1991.01.29
申请号
JP19890153730
申请日期
1989.06.16
申请人
SHIN ETSU CHEM CO LTD
发明人
FURUHATA TOMOYOSHI;YAGIHASHI FUJIO;YAMAMOTO AKIRA
分类号
A01N55/00;C07F7/18
主分类号
A01N55/00
代理机构
代理人
主权项
地址
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