发明名称 |
Method of manufacturing a gas detection sensor, and the resulting sensor |
摘要 |
A method of manufacturing a sensor for detecting trace or impurity gases, the method comprising evaporating tin and/or tin oxides under a partial pressure of oxygen in order to condense vapor on an electrically insulating substrate to obtain a porous layer deposit therein. The metal or the metal oxides is/are evaporated under a flow of a mixture of gases containing both oxygen and an inert gas at a total pressure of not less than 100 pascals and with the partial pressure of the oxygen in the mixture being not more than 130 pascals.
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申请公布号 |
US4988539(A) |
申请公布日期 |
1991.01.29 |
申请号 |
US19890446545 |
申请日期 |
1989.12.06 |
申请人 |
ASSOCIATION POUR LA RECHERCHE ET LE DEVELOPPMENT DES METHODES ET PROCESSUS INDUSTRIELS - ARMINES |
发明人 |
BREUIL, PHILIPPE;PIJOLAT, CHRISTOPHE;TOURNIER, GUY;LALAUZE RENE |
分类号 |
G01N27/12 |
主分类号 |
G01N27/12 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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