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发明名称
PHOTORESIST TREATMENT OF TITANIUM EXCELLENT IN ETCHING
摘要
申请公布号
JPH0320483(A)
申请公布日期
1991.01.29
申请号
JP19890155056
申请日期
1989.06.17
申请人
NIPPON STEEL CORP;NIPPON PARKERIZING CO LTD
发明人
ARAI SHINICHI;IWAKURA HIDEAKI;SASAKI NORIMASA;TSUKAHARA YASUO;KAWASAKI IWAO;OYAMA KAZUYUKI;UMETSU TAKEJI
分类号
G03F7/11;C23C22/26;C23C22/30;C23F1/00
主分类号
G03F7/11
代理机构
代理人
主权项
地址
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