| 摘要 |
PURPOSE:To facilitate removal of scums and residue at pattern edges by providing an aspirating nozzle with an ultrasonic vibrator. CONSTITUTION:An aspirating nozzle 3 which produces an atomized developer 6 is equipped with an ultrasonic vibrator 7. When pressurized nitrogen, inactive gas, and the developer are mixed and formed into atomized particle shapes, the developer 6 receives kinetic energy which is obtained by converting vibration energy from the ultrasonic vibrator 7 into kinetic energy in addition to having kinetic energy as a result of pressurizing nitrogen and inactive gas. Eventually, the atomized developer 6 which has kinetic energy exceeding conventional kinetic energy beats the surface of a resist 4 heavily and its beating accelerates the rate of development. This blows off scums and residua easily at pattern edges in terms of physico-chemical treatment. |
