| 摘要 |
PURPOSE:To prevent a pattern corner part from being collapsed by adding protruding patterns to the vertex of a light shielding film part, thereby generating sparks. CONSTITUTION:The shielding film part 1 of metal (oxide) is formed on a substrate in this photomask, on its vertex the protruding patterns 3 which are smaller than the resolution of a mask aligner are formed from each vertex protruding in the direction of the opposite vertex. Further, protruding patterns 5 of shapes protruding to the outer side from each corner of a frame pattern 4 may also be formed. |
