| 摘要 |
A method of producing a primary diffraction grating includes depositing a resist pattern for producing a secondary diffraction grating on a substrate and thereafter etching the substrate using the resist as a mask, thereby producing a secondary diffraction grating, depositing a second mask material on the substrate and on the remaining resist, and subsequently removing the resist, and etching the exposed surface of the substrate using the second mask material as a mask, thereby to produce a primary diffraction grating. Therefore, there arises no waviness in the pattern end of the second resist mask pattern and a high quality primary diffraction grating can be produced.
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